Multilayer wire-grid polarizer with off-set wire-grid and dielectric grid

ABSTRACT

A wire-grid polarizer includes a wire-grid layer disposed over a substrate. A plurality of contiguous dielectric-grid layers are contiguous with one another and disposed directly on top of the wire-grid layer. The plurality of contiguous dielectric-grid layers includes different materials with different indices of refraction. The array of dielectric material elements and the array of metal elements are oriented substantially parallel with one another, and the arrays having substantially equal periods.

CROSS-REFERENCE TO RELATED APPLICATIONS AND CLAIM OF PRIORITY

This is a continuation of U.S. patent application Ser. No. 12/400,100,filed on Mar. 9, 2009 now U.S. Pat. No. 7,813,039; which is a divisionalof U.S. patent application Ser. No. 11/005,927, filed on Dec. 6, 2004,now U.S. Pat. No. 7,570,424; which are herein incorporated by reference.

BACKGROUND

The present invention relates generally to wire-grid polarizers for thevisible and near visible spectrum.

A wire grid polarizer (WGP) is an array of parallel wires disposed onthe surface of a substrate, such as glass. Usually wire-grid polarizersare a single, periodic array of wires on the substrate. The grid acts asa diffraction grating when the period of the wires is greater than abouthalf of the wavelength of light. The grid acts as a polarizer when theperiod of the wires is less than about half the wavelength of light.

While it is desirable for a WGP to transmit all of the light of onepolarization and reflect all of the other polarization, no polarizer isperfect. Real WGPs will transmit some of the light of both polarizationsand will reflect some of the light of both polarizations. When light isincident on the surface of a transparent material, such as a sheet ofglass, a small amount of the light is reflected. For example, at normalincidence, about 4% of the incident light is reflected from each surfaceof the glass.

It has been suggested to dispose a film under a WGP, or between thewires and the substrate, to move the first diffraction order to shorterwavelengths in order to improve performance in part of the visiblespectrum, such as blue light. See U.S. Pat. No. 6,122,103. The film hasan index of refraction less than that of the substrate. It has also beensuggested to etch into either the substrate or underlying layer tofurther reduce the effective refractive index under the wire grid. SeeU.S. Pat. No. 6,122,103. It has been further suggested to form each wireas a composite with alternating metal and dielectric layers. See U.S.Pat. No. 6,532,111.

SUMMARY

It has been recognized that it would be advantageous to develop awire-grid polarizer with improved performance, or a wire-grid polarizerwith increased transmission of a desired polarization state, such as p,and decreased transmission (or increased reflection) of anotherpolarization state, such as s. In addition, it has been recognized thata wire-grid polarizer can act as a metal for reflecting one polarizationstate and act as a thin film of lossy dielectric for the otherpolarization state. Thus, it has been recognized that form birefringenceand effective index of refraction can be applied to a wire-gridpolarizer. In addition, it has been recognized that a wire-gridpolarizer can be treated as a thin film layer, and incorporated into anoptical stack.

Briefly, and in general terms, the invention is directed to multilayerwire-grid polarizers for polarizing light. In accordance with one aspectof the invention, the polarizer includes a wire-grid layer disposed overa substrate. The wire-grid layer includes an array of elongated metalelements having lengths longer than a wavelength of the light and aperiod less than half the wavelength of the light and defining gapsbetween the elements. A plurality of contiguous dielectric-grid layersare contiguous with one another and disposed directly on top of thewire-grid layer. Each dielectric-grid layer includes an array ofdielectric material elements. The plurality of contiguousdielectric-grid layers includes different materials with differentindices of refraction. The array of dielectric material elements and thearray of metal elements are oriented substantially parallel with oneanother, and the arrays having substantially equal periods.

In accordance with another aspect of the present invention, thepolarizer includes a stack of thin film layers disposed over asubstrate. At least one of the thin film layers is uniform in structureand material. At least one of the thin film layers includes a wire-gridarray of elongated metal elements having lengths longer than awavelength of the light and a period less than half the wavelength ofthe light. At least one of the thin film layers includes a dielectricarray of dielectric material elements.

BRIEF DESCRIPTION OF THE DRAWINGS

Additional features and advantages of the invention will be apparentfrom the detailed description which follows, taken in conjunction withthe accompanying drawings, which together illustrate, by way of example,features of the invention; and, wherein:

FIGS. 1 and 2 are cross-sectional side schematic views of multilayerwire grid polarizers in accordance with embodiments of the presentinvention (the figures are not to scale and features are shown greatlyexaggerated for clarity);

FIG. 3 is a cross-sectional side schematic view of a multilayer wiregrid polarizer in accordance with an exemplary embodiment of the presentinvention (the figure is not to scale and features are shown greatlyexaggerated for clarity);

FIG. 4 a is a graph of p-polarization reflection versus wavelength forthe multilayer wire grid polarizer of FIG. 3 compared to otherpolarizers;

FIG. 4 b is a graph of s-polarization transmittance versus wavelengthfor the multilayer wire grid polarizer of FIG. 3 compared to otherpolarizers;

FIG. 4 c is a graph of p-polarization transmittance versus wavelengthfor the multilayer wire grid polarizer of FIG. 3 compared to otherpolarizers;

FIG. 5 is a cross-sectional side schematic view of a multilayer wiregrid polarizer in accordance with an exemplary embodiment of the presentinvention (the figure is not to scale and features are shown greatlyexaggerated for clarity);

FIG. 6 a is a graph of s-polarization reflection versus wavelength forthe multilayer wire grid polarizer of FIG. 5 compared to anotherpolarizer;

FIG. 6 b is a graph of p-polarization transmittance versus wavelengthfor the multilayer wire grid polarizer of FIG. 5 compared to anotherpolarizer;

FIG. 7 is a cross-sectional side schematic view of a multilayer wiregrid polarizer in accordance with an exemplary embodiment of the presentinvention (the figure is not to scale and features are shown greatlyexaggerated for clarity);

FIG. 8 is a cross-sectional side schematic view of a multilayer wiregrid polarizer in accordance with an exemplary embodiment of the presentinvention (the figure is not to scale and features are shown greatlyexaggerated for clarity);

FIG. 9 is a graph of p-polarization reflection versus wavelength for themultilayer wire grid polarizers of FIGS. 7 and 8 compared to anotherpolarizer;

FIGS. 10 a and b are cross-sectional side schematic views of multilayerwire grid polarizers in accordance with exemplary embodiments of thepresent invention (the figures are not to scale and features are showngreatly exaggerated for clarity);

FIG. 11 is a graph of s-polarization reflection versus wavelength forthe multilayer wire grid polarizers of FIGS. 10 a and b compared toanother polarizer;

FIG. 12 is a cross-sectional side schematic view of another multilayerwire grid polarizer in accordance with exemplary embodiments of thepresent invention (the figure is not to scale and features are showngreatly exaggerated for clarity);

FIG. 13 is a graph of s-polarization transmittance versus wavelength forthe multilayer wire grid polarizer of FIG. 112 compared to anotherpolarizer;

FIG. 14 is a side cross-sectional view of a wire grid layer with adielectric material in spaces between metal elements of the wire gridlayer in accordance with an exemplary embodiment of the presentinvention; and

FIG. 15 is a side cross-sectional view of a dielectric grid layer withtwo dielectric grids with elements of two different materials inaccordance with an exemplary embodiment of the present invention.

Reference will now be made to the exemplary embodiments illustrated, andspecific language will be used herein to describe the same. It willnevertheless be understood that no limitation of the scope of theinvention is thereby intended.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENT(S)

It has been recognized that, for one polarization of light, a wire-gridpolarizer substantially acts as a metal that reflects the light (or onepolarization thereof), while for the other polarization of the light,the wire-grid polarizer substantially acts as a thin film of lossydielectric that transmits the light (or another polarization thereof).Thus, it has been recognized that two concepts, namely formbirefringence and effective index of refraction, can be applied toimprove the performance of the polarizer.

A wire-grid polarizer is not typically considered an example of formbirefringence. Generally, birefringence means that a material has adifferent index of refraction for different polarizations. Birefringenceis very common in crystalline materials, such as quartz, and instretched polymers. Form birefringence refers to birefringence caused bythe shape of a material.

When a material has variations in material properties, such as density,with the scale of the variation being smaller than the wavelength oflight, the index of refraction is different from the index of uniformbulk material. There is an effective refractive index, which is theindex that a uniform thin film would have that causes the same affect onlight. The theoretical treatment of this effect is called effectivemedium theory. This phenomenon is used with dielectric materials to makesuch things as moth-eye antireflection coatings.

In addition, a wire-grid polarizer is not typically considered a thinfilm. In optics, both form birefringence and effective index aretypically considered only for dielectric materials. It has beenrecognized, however, that treating a wire-grid polarizer as anequivalent birefringent thin film with effective indices of refractionallows one to consider it as an element in a thin film stack, and to usethin film design techniques with particular performance goals.

The present invention utilizes thin films in combination with a metallicwire grid polarizer to improve performance of the polarizer. Generallythis may include films under and on top of the wire grid. Any one ofthese films may be uniform or a dielectric grid. The wire grid may be acomposite grid, or have composite wires. Combining the wire grid withmultiple layers of different material, and thus different refractiveindices, can reduce reflection of the polarization that is desired to betransmitted. For example, a wire grid can be configured to reflect spolarized light, and transmit p polarized light. As discussed above,while it is desirable to transmit all the p polarized light and reflectall the s polarized light, a typical wire grid will transmit some ofboth polarizations and reflect some of both polarizations. It has beenfound, however, that treating the wire grid as a birefringent thin film,and combining the wire grid with multiple thin films, reduces reflectionof p polarized light.

As illustrated in FIGS. 1 and 2, multilayer wire-grid polarizer devices,indicated generally at 10 a and 10 b, respectively, are shown asexemplary implementations in accordance with the invention forpolarizing light 12, or substantially separating one polarization statefrom an orthogonal polarization state, and doing so in an improvedmanner, with less reflection and/or transmission of unwantedpolarizations. Such devices are believed to have substantial utility invisible light applications, or for use with visible light in the rangeof approximately 400-700 nm (nanometers), or 0.4-0.7 μm (micrometers ormicrons). Such visible light applications can include projection displaydevices such as projectors. The multilayer wire-grid polarizer devicesdescribed herein can be utilized in various different capacities, suchas polarizers, beam splitters, analyzers, etc. It is also believed thatthe devices herein have utility in near-visible applications, such asultraviolet and/or infrared applications, or for use with light in therange of approximately 250-400 nm or 700-10,000 nm. Thus, the term“light” is used broadly herein to refer to visible light, ultravioletlight and infrared light, or electromagnetic waves in the range of250-10,000 nm.

The polarizers 10 a and 10 b include a substrate 14 carrying orsupporting a plurality or stack of thin film layers 18, including a wiregrid or a wire grid layer 22. The substrate 14 can be transparent to thelight being treated. For example, the substrate can be glass (Bk7).

Other substrates can be quartz or plastic. In addition, the substrate 14can have a substantial thickness t_(s) with respect to the remainingthin film layers. Furthermore, the substrate can have a refractive index(or index of refraction) n_(s). For example, a glass substrate (Bk7) hasa refractive index n_(s) of 1.52 (at 550 nm). (It will be appreciatedthat the refractive index varies slightly with wavelength.)

The wire grid or wire grid layer 22 includes a wire-grid array ofelongated metal elements 26. The elements 26 have lengths longer than awavelength of the light, and are located in a generally parallelarrangement with a period P less than half the wavelength of the light.Thus, for use with visible light, the elements 26 have a length largerthan the wavelength of visible light, or greater than 700 nm (0.7 μm).The length, however, can be much longer. The elements 26 can have acenter-to-center spacing, pitch or period P less than half thewavelength of visible light, or less than 200 nm (0.2 μm). The elements26 can also have a width w in the range of 10 to 90% of the pitch orperiod. The elements 26 can also have a thickness or a height t lessthan the wavelength of the light, or less than 400 nm (0.4 μm) forvisible light applications. In one aspect, the thickness can be lessthan 0.2 μm for visible light applications.

The elements 26, or the array, generally interact with the visible lightto generally 1) transmit a transmitted beam 30 having a substantiallyuniform and constant linear polarization state (such as p polarization),and 2) reflect a reflected beam 34 also have a substantially uniform andconstant linear polarization state (such as s polarization). Theelements generally transmit light with a first polarization state (ppolarization), oriented locally orthogonal or transverse to theelements, and reflect light with a second polarization state (spolarization), oriented parallel to the elements. It will be appreciatedthat the wire-grid polarizer will separate the polarization states ofthe light with a certain degree of efficiency, or some of bothpolarization states may be transmitted and/or reflected. It will also beappreciated that a portion of the elements can be configured to transmitor reflect a different polarization state.

The elements 26 or array can be formed on or over the substrate byphoto-lithography. The elements 26 can be conductive, and can be formedof aluminum, silver, gold or copper.

The plurality of thin film layers 18 can include layers under and/orover the wire grid layer 22. Thus, one or more layers 18 a-c can bedisposed between the substrate 14 and the wire grid layer 22. Inaddition, one or more layers can be disposed over the wire grid layer22. The layers 18 can be formed of different materials, or materialsdifferent than the substrate 14, and even from each other. Thus, thelayers 18 can have refractive indices n different than the refractiveindex n_(s) of the substrate 14. Furthermore, it has been found that atleast one of the layers 18 a-c having a refractive index n₁₋₃ greaterthan the refractive index n_(s) of the substrate 14 decreases reflectionof the p polarized light. Thus, in accordance with one aspect of theinvention, the polarizer 10 a or 10 b has at least one thin film layer18 a disposed between the substrate 14 and the wire grid layer 22, andthe thin film layer 18 a has a refractive index n₁ greater than therefractive index n_(s) of the substrate 14. In accordance with anotheraspect of the invention, the polarizer 10 a or 10 b can have at leasttwo thin film layers 18 a and b, or at least three thin film layers 18a-c.

The thin film layers 18 a-c can extend continuously across the substrate14, and can be consistent or constant layers, indicated by 18 a and 18c. The layers 18 a-c can be formed of dielectric material. For example,the layers can be formed of aluminum oxide; antimony trioxide; antimonysulphide; beryllium oxide; bismuth oxide; bismuth triflouride; cadmiumsulphide; cadmium telluride; calcium fluoride; ceric oxide; chiolite;cryolite; germanium; hafnium dioxide; lanthanum fluoride; lanthanumoxide; lead chloride; lead fluoride; lead telluride; lithium fluoride;magnesium fluoride; magnesium oxide; neogymium fluoride; neodymiumoxide; praseodymium oxide; scandium oxide; silicon; silicon oxide;disilicon trioxide; silicon dioxide; sodium fluoride; tantalumpentoxide; tellurium; titanium dioxide; thallous chloride; yttriumoxide; zinc selenide; zinc sulphide; and zirconium dioxide. The filmlayers can be deposited on the substrate. In the case of metal oxides,they can be deposited by starting with an oxide evaporant material (withadditional oxygen backfill as needed). The material, however, can alsobe deposited by evaporating a base metal, then oxidizing the depositedmaterial with O2 in the background.

The thicknesses t₁₋₃ and materials (or refractive indices n₁₋₃) of thethin film layers 18 a-c can be manipulated to reduce reflection of ppolarized light, as described in greater detail below.

One or more of the thin film layers 18 a-c can include a dielectric gridincluding an array of non-metal elements 38. The non-metal and metalelements 38 and 26 of the arrays can be oriented substantially parallelwith one another. In addition, the arrays can have substantially equalperiods and/or widths. In one aspect, the non-metal elements 38 of thedielectric grid and the metal elements 26 are aligned, or the non-metalelements 38 are aligned with the metal elements 26 of the wire gridlayer, as shown in FIG. 1. In another aspect, the non-metal elements 38of the dielectric grid and the metal elements 26 are off-set, or thenon-metal elements 38 are off-set with respect to the metal elements 26of the wire grid layer, as shown in FIG. 2.

As stated above, the plurality of thin film layers 18 can include one ormore other thin film layers disposed over the wire-grid layer 22. Theother thin film layer can include a dielectric material, and can becontinuous or constant. In addition, the other thin film layer 42 caninclude a dielectric grid including an array of non-metal elements 46.The non-metal and metal elements 46 and 26 of the arrays can be orientedsubstantially parallel with one another, and can have substantiallyequal periods. In one aspect, the non-metal elements 46 and metalelements 26 are aligned, or the non-metal elements 46 of the dielectricgrid are aligned above or over the metal elements 26 of the wire gridlayer 22, as shown in FIG. 1. In another aspect, the non-metal elements46 and metal elements 26 are off-set, or the non-metal elements 46 ofthe dielectric grid are off-set above the metal elements 26 of the wiregrid layer 22.

As discussed above, the number, thicknesses t, and materials (orrefractive indices) of the thin film layers 18 can be varied to reducereflection of p polarized light (increase transmission of p polarizedlight) and/or reduce transmission of s polarized light (increasereflection of s polarized light). Some of the layers 18 a and c can beuniform in structure and material, while other layers can include grids,such as metal elements 26 of the wire grid layer 22 or non-metalelements 38 and 46 of a dielectric grid. Examples of specificconfigurations are discussed below.

Referring to FIG. 3, an example of a multilayer wire-grid polarizer 10 cis shown. The polarizer includes three uniform thin film layers 50 a-con a glass (BK7) substrate 14 and between the substrate and the wiregrid or wire grid layer 22. The substrate 14 has a refractive indexn_(s) of 1.52. The first thin film layer 50 a is a uniform material ofmagnesium oxide (MgO) having a thickness t₁ of 65 nm. Thus, the firstlayer 50 a has a refractive index n₁ of 1.74 (for a wavelength of 550nm) greater than the refractive index n_(s) of the substrate 14. Thesecond thin film layer 50 b is a uniform material of ZrO₂ having athickness t₂ of 130 nm, and a refractive index of 2.0. Thus, the secondlayer 50 b also has a refractive index n₂ greater than the refractiveindex n_(s) of the substrate 14. The third thin film layer 50 c is auniform material of magnesium fluoride (MgF2) having a thickness t₃ of70 nm. Thus, the third layer 50 c has a refractive index n₃ of 1.38 (fora wavelength of 550 nm).

The wire grid layer 22 or wire grid is disposed on top of the thirdlayer 50 c. The wire grid includes elements made of aluminum. Theelements can have a period P of 144 nm, a width w of 39.5% of theperiod, or 57 nm, and a thickness t_(wg) or height of 155 nm.

Referring to FIGS. 4 a-c, the performance of the polarizer 10 c of FIG.3 is compared to a similar polarizer with no thin film layers betweenthe wire grid and substrate, and a similar polarizer with a 30 nm layerof magnesium fluoride (MgF₂) between the wire grid and substrate (andthus has a thin film layer with a lower refractive index than thesubstrate). Light 12 is incident on the polarizer 10 c at an incidenceangle of 45 deg. In this case, the p polarization 30 is primarilytransmitted, and the s polarization 34 is primarily reflected. Referringto FIG. 4 a, the transmittance of the p polarization through thepolarizer 10 c is greater than the other two polarizers (or thereflectance of p polarization from the polarizer is less), as shown bycurve at 54. While it can be seen that the polarizer with a thin layerof lower refractive index performs better than the plain polarizer, thepolarizer 10 c with the three thin film layers 50 a-c performs evenbetter. Referring to FIG. 4 b, transmittance (leakage) of s polarizationlight is less with the polarizer 10 c than with either of the otherpolarizers (or the transmittance of s polarization through the polarizeris less), as shown by curve 56. Referring to FIG. 4 c, the reflection ofthe p polarization is generally less with the polarizer 10 c than withthe other polarizers (or the transmittance of p polarization isgreater), as shown by curve 58. The net result is that there is moretransmitted p polarization, and improved contrast in both transmissionand reflection, which means the purity of the transmitted and reflectedpolarizations is greater with the multiplayer polarizer 10 c.

Referring to FIG. 5, another example of a multilayer wire-grid polarizer10 d is shown. The polarizer 10 d includes two dielectric layers or twodielectric grids 60 a and 60 b disposed directly on top of a wire gridlayer 22 or wire grid with elements of aluminum. The wire grid or wiregrid layer 22 is disposed on a glass (BK7) substrate 14. The thicknessor height t_(wg) of the elements 26 of the wire grid is 160 nm. Thefirst dielectric grid 60 a is disposed on the wire grid and has athickness t₁ is 100 nm, and formed of silicon oxide (SiO2), with anindex of refraction n₁ of 1.45. The second dielectric grid 60 b also hasa thickness t₂ of 100 nm, and is formed of a material with an index ofrefraction n₂ of 2.5. The period P of the grids is 144 nm. The width ofthe elements is 45% of the period P, or 57 nm. Light 12 is incident at45 degrees.

Referring to FIGS. 6 a and b, the performance of the polarizer 10 d ofFIG. 5 is compared to a similar polarizer without dielectric grids ontop. Because the period P of the grids is less than the wavelength ofvisible light, they all essentially behave as thin films. In FIG. 6 a itis seen that the reflected s polarization is substantially greater withthe polarizer 10 d, as shown by curve at 62. In FIG. 6 b it is seen thatthe transmitted p polarization is also greater with the polarizer 10 d,as shown by curve at 64.

Referring to FIG. 7, another example of a multilayer wire-grid polarizer10 e is shown. The polarizer 10 e includes three uniform thin filmlayers 70 a-c between a wire grid or wire grid layer 22 and a glass(BK7) substrate 14. The first layer 70 a is disposed on the substrate14, has a thickness t₁ of 33 nm thick, and has a refractive index n₁ of1.8. The second layer 70 b is a material of magnesium fluoride (MgF₂)with a refractive index n₂ of 1.38, and a thickness t₂ of 30 nm. Thethird layer 70 c has a thickness t₃ of 20 nm, and has a refractive indexn₃ of 1.8. Thus, the first and third layers 70 a and c have refractiveindices n₁ and n₃ greater than the refractive index n_(s) of thesubstrate 14. The wire grid or wire grid layer 22 includes elements ofaluminum with a period P of 144 nm. The element height t_(wg) is 160 nm,and the element width w is 45% of the period, or 57 nm. Light 12 isnormally incident (0 deg.).

Referring to FIG. 8, another example of a multilayer wire-grid polarizer10 f is shown. The polarizer 10 e includes three thin film layers 80a-c, similar to those described above for FIG. 7, except that the firstlayer 80 a has a thickness t₁ of 28 nm; the second layer 80 b has athickness t₂ of 25 nm; and the third layer 80 c has a thickness t₃ of 17nm. In addition, the polarizer 10 f includes a thin film layer 84 abovethe wire grid layer 22. The thin film layer 84 includes a dielectricgrid with non-metal elements disposed on the metal elements of the wiregrid. The wire grid or wire grid layer 22 is similar to the wire griddescribed above for FIG. 7. The elements of the dielectric layer 84 havea thicknesses t₄ of 100 nm. The elements of the dielectric layer 84 areformed of silicon dioxide (SiO₂).

Referring to FIG. 9, the performance of the polarizers 10 e and f iscompared with a similar wire grid polarizer without the thin filmlayers. Both polarizers 10 e and f reflect less p polarization (passmore p polarization), as shown by curves at 86 and 88. The polarizer 10f with thin film layers under the wire grid layer and dielectric gridsabove the wire grid shows significant improvement, as shown by curve at88.

Referring to FIGS. 10 a and b, examples of multilayer wire-gridpolarizers 10 g and h are shown. Both polarizers 10 g and h include awire grid or wire grid layer 22 disposed on a substrate 14. The wiregrid can include elements of aluminum and the substrate can be glass(BK7). The period P of the wire grid is 144 nm, and the elements have athickness t_(wg) of 150 nm. The width w of the elements is 45% of theperiod, or 65 nm. In addition, the elements 26 define spaces 92therebetween that include a material with a refractive index n₁ of 1.17.A second uniform layer 96 is disposed on top of the elements 26 andspaces 92, or the wire grid layer 22, that has a thickness t₂ of 100 nmand a refractive index n₂ of 1.17. A third thin film layer 100 isdisposed over the second layer 96. The third layer 100 has uniform layerof silicon dioxide (SiO₂) and a thickness t₃ of 60 nm. Thus, the thirdlayer 100 has an index of refraction n₃ of 1.45. A fourth layer 104 isdisposed on the third layer 100, and includes a dielectric grid withnon-metal elements. The elements of the dielectric grid have a thicknesst₄ of 50 nm. The elements of the dielectric grid are formed of silicondioxide (SiO2) and have a refractive index n₄ of 2.0. The width w of theelements of the dielectric layer is 50% of the period. The elements ofthe dielectric layer are disposed substantially directly above theelements of the wire grid, as shown in FIG. 10 a. Alternatively, theelements of the dielectric layer can be off-set with respect to theelements of the wire grid, or are shifted one half period so that theyare substantially above the spaces between the elements of the wiregrid, as shown in FIG. 10 b. The light 12 is incident at 45 degrees.

Referring to FIG. 11, the performance of the polarizers 10 g and h arecompared with a similar polarizer with only a wire grid on a glasssubstrate. The polarizers 10 g and h have improved reflectance of spolarization, as shown by curves at 104 (which overlap each other). Inaddition, it appears that the alignment of the dielectric grid to thewire grid is not relevant when the conditions for effective mediumtheory apply. These examples also show that uniform layers anddielectric layers may be combined and used to advantage. In addition,these examples demonstrate the principle of the effective medium theory.

Referring to FIG. 12, another example of a multilayer wire-gridpolarizer 10 i is shown. The polarizer 10 i is similar to the polarizer10 c of FIG. 3, but includes a wire grid or wire grid layer 112 withcomposite elements. The composite elements can include alternatinglayers of metal and non-metal layers. Examples of such compositeelements are found in U.S. Pat. No. 6,532,111, which is hereinincorporated by reference. For example, each element can include ofalternating layers of aluminum and magnesium fluoride.

Referring to FIG. 13, the performance of the polarizer 10 i is comparedto a similar polarizer with composite elements, but without the thinfilm layers between the substrate and the wire grid layer. The polarizer10 i has less leakage or transmittance of s polarization, as shown bycurve at 116.

Referring to FIG. 14, a wire grid layer 22 similar to those describedabove but with a dielectric material 120 in spaces between metalelements of the wire grid layer. Such a wire grid or wire grid layer canbe substituted for any of those described above.

Referring to FIG. 15 a dielectric grid layer is shown with twodielectric grids 124 and 128 with elements of two different materialshaving two different indices of refraction n₁ and n₂ respectively. Thus,the dielectric layer or grid has alternating elements of differentmaterial, or elements of one grid disposed in the spaces of anothergrid. Such a dielectric grid or layer can be substituted for any ofthose described above.

The examples presented here are but a few of the many possibilities thatmay be realized from this invention. In general, a combination foruniform layers and dielectric grids may be combined for specificapplications such as optimizing transmittance or reflectance over agiven range of angles of incident of a given band of light. Optimizationmay be made for transmittance or reflectance or for both together.Optimization may be made for incidence from the air side on thepolarizer or from the substrate side or both.

Various aspects of wire-grid polarizers, optical trains and/orprojection/display systems are shown in U.S. Pat. Nos. 5,986,730;6,081,376; 6,122,103; 6,208,463; 6,243,199; 6,288,840; 6,348,995;6,108,131; 6,452,724; 6,710,921; 6,234,634; 6,447,120; and 6,666,556,which are herein incorporated by reference.

Although the wire-grid polarizers have been illustrated as facing thelight source, or with the elongated elements facing towards the lightsource, it is understood that this is for illustrational purposes only.Those skilled in the art will appreciate that the wire-grid polarizerscan be oriented to face towards imaging bearing beams, such as from aliquid crystal array, for the simple purpose of avoiding passing theimage bearing beam through the substrate, and thus avoiding ghost imagesor multiple reflections associated with light passing through mediums,such as the substrate. Such configurations may result in the wire-gridpolarizer facing away from the light source.

While the forgoing examples are illustrative of the principles of thepresent invention in one or more particular applications, it will beapparent to those of ordinary skill in the art that numerousmodifications in form, usage and details of implementation can be madewithout the exercise of inventive faculty, and without departing fromthe principles and concepts of the invention. Accordingly, it is notintended that the invention be limited, except as by the claims setforth below.

1. A wire-grid polarizer device for polarizing light, comprising: a) asubstrate; b) a wire-grid layer, disposed over the substrate, thewire-grid layer including an array of elongated metal elements havinglengths longer than a wavelength of the light and a period less thanhalf the wavelength of the light and defining gaps between the elements;and c) a plurality of contiguous dielectric-grid layers contiguous withone another, disposed directly on top of the wire-grid layer, eachdielectric-grid layer including an array of dielectric materialelements, the plurality of contiguous dielectric-grid layers includingdifferent materials with different indices of refraction; and d) thearray of dielectric material elements and the array of metal elementsbeing oriented substantially parallel with one another, and the arrayshaving substantially equal periods.
 2. A device in accordance with claim1, further comprising: at least one continuous thin film layer disposedbetween the wire-grid layer and the substrate and extending between thegaps.
 3. A device in accordance with claim 2, wherein the at least onecontinuous thin film layer comprises a plurality of continuous thin filmlayers with different refractive indices with respect to one another,disposed between the wire-grid layer and the substrate and extendingbetween the gaps.
 4. A device in accordance with claim 3, wherein atleast one of the continuous thin film layers includes a dielectric gridincluding an array of dielectric material elements.
 5. A device inaccordance with claim 2, further comprising at least one continuous thinfilm layer disposed over the plurality of contiguous dielectric-gridlayers.
 6. A device in accordance with claim 5, wherein the at least onecontinuous thin film layer disposed over the plurality of contiguousdielectric-grid layers comprises a plurality of continuous thin filmlayers with different refractive indices with respect to one another. 7.A device in accordance with claim 5, wherein the at least one continuousthin film layer disposed over the plurality of contiguousdielectric-grid layers includes a dielectric grid including an array ofdielectric material elements.
 8. A device in accordance with claim 1,wherein an index of refraction of a lower of the plurality of contiguousdielectric-grid layers is less than an index of refraction of an upperof the plurality of contiguous dielectric-grid layers.
 9. A device inaccordance with claim 1, further comprising grooves etched in thesubstrate to form ribs extending therefrom, wherein the wire-grid layeris supported on the ribs.
 10. A device in accordance with claim 1,wherein: the elongated metal elements comprise aluminum; at least two ofthe at least two film layers comprises silicon.
 11. A device inaccordance with claim 10, wherein at least one of the at least two filmlayers comprises silicon dioxide.
 12. A device in accordance with claim1, wherein the wire grid layer and the at least two film layers incombination define an array of ribs, wherein a width of an individualrib is approximately the same at a base of the individual rib as at atop of the individual rib.
 13. A device in accordance with claim 1,wherein the wire grid layer and the at least two film layers incombination define an array of ribs with gaps therebetween, wherein adistance between ribs at a base of the ribs is approximately the same asa distance between the ribs at a top of the ribs.
 14. A device inaccordance with claim 1, wherein the elongated metal elements comprisealuminum; the at least two film layers comprise at least three filmlayers; at least one of the at least three film layers comprises silicondioxide; another at least one of the at least three film layerscomprises silicon; and another at least one of the at least three filmlayers comprises tantalum.
 15. A wire-grid polarizer device forpolarizing light, comprising: a) a substrate; b) a stack of thin filmlayers, disposed over the substrate, and extending continuously acrossthe substrate; c) at least one of the thin film layers being uniform instructure and material; d) at least one of the thin film layersincluding a wire-grid array of elongated metal elements having lengthslonger than a wavelength of the light and a period less than half thewavelength of the light and a period less than half the wavelength ofthe light and defining gaps between the elements; and e) at least two ofthe thin film layers including contiguous dielectric arrays ofdielectric material elements disposed directly on top of the wire-gridarray, wherein the dielectric array of dielectric material elements andthe wire-grid array of elongated metal elements are orientedsubstantially parallel with one another and the arrays havesubstantially equal periods, and wherein, the contiguous dielectricarrays include different materials with different indices of refraction.16. A device in accordance with claim 15, wherein the dielectricmaterial and metal elements of the arrays are oriented substantiallyparallel with one another, and the arrays having substantially equalperiods.
 17. A device in accordance with claim 16, wherein dielectricmaterial elements of the dielectric grid are aligned above the metalelements of the wire grid layer.
 18. A device in accordance with claim16, wherein dielectric material elements of the dielectric grid areoff-set above the metal elements of the wire grid layer.
 19. A device inaccordance with claim 15, further comprising: at least one thin filmlayer, disposed between the substrate and the wire-grid layer.
 20. Adevice in accordance with claim 19, wherein the at least one thin filmlayer includes a plurality of thin film layers with different refractiveindices with respect to one another.
 21. A device in accordance withclaim 19, wherein at least one of the thin film layers between thesubstrate and the wire-grid layer has a refractive index greater than arefractive index of the substrate.
 22. A device in accordance with claim19, wherein the at least one thin film layer extends continuously acrossthe substrate.
 23. A device in accordance with claim 19, furthercomprising: at least one other thin film layer, disposed over thedielectric layer.